Search

John Martin Algots

from Poway, CA
Age ~61
Get Report
Also known as:
John M Algots, Martin Algots
Phone and address:
14685 Kalapana St, Poway, CA 92064
(858) 842-1944
Related to:
Allae Mcarthur, 33Michael A Faubion, 60Richard J Dehoff, 74Joanne Dehoff, 68Sara L Algots, 59
Connected to:
Lawrence G Algozino, 73Diana V Algra, 75Oscar A Algranatti, 79Holly A Algreen, 47Lara L Algren, 58Matthew D Algren, 52Thomas W Algren, 89Alton K Algrim, 75Douglass Alguera, 37Manuel Alguino, 57

John Algots Phones & Addresses

  • 14685 Kalapana St, Poway, CA 92064 (858) 842-1944
  • San Diego, CA
  • Corvallis, OR
  • Scio, OR
  • Lebanon, OR
  • 14685 Kalapana St, Poway, CA 92064

Business Records

Name / Title
Company / Classification
Phones & Addresses
John Algots
Principal
Algots Desing
Business Consulting Services · Accountant
11015 Scripps Rnch Blvd, San Diego, CA 92131
14685 Kalapana St, Poway, CA 92064
(858) 530-8237

Publications

Us Patents

Line Narrowing Unit With Flexural Grating Mount

View page
US Patent:
6496528, Dec 17, 2002
Filed:
Jun 29, 2001
Appl. No.:
09/895664
Inventors:
Clay C. Titus - San Diego CA
William G. Hulburd - San Diego CA
Raymond F. Cybulski - San Diego CA
John M. Algots - San Diego CA
Michael S. Lysik - Yorba Linda CA
Assignee:
Cymer, Inc. - San Diego CA
International Classification:
H01S 308
US Classification:
372102, 372 20, 372 57, 372 99, 385 37
Abstract:
A grating based line narrowing device for line narrowing lasers producing high energy laser beams. Techniques are provided for minimizing adverse effects of heat produced by the laser beam inside the line narrowing device. A flexural grating mount is provided which virtually eliminates stress on the grating caused by differential thermal expansion between the grating and the LNP housing structure. In a preferred embodiment the grating which is comprised of a very thin lined aluminum surface on a thick ultra low expansion glass substrate is attached to an aluminum housing structure using a flexural grating mount. At least one flexure joint is provided in the grating mount which permits thermal expansion and contraction of the aluminum housing without producing undesirable mechanical stresses in the glass substrate of the grating. In some embodiments the mount comprises a metal plate and the flexure joint is a H-Flex joint which is machined into the metal plate. In another embodiment two H-Flex joints are provided.

Fast Wavelength Correction Technique For A Laser

View page
US Patent:
6529531, Mar 4, 2003
Filed:
Jun 19, 2000
Appl. No.:
09/597812
Inventors:
George J. Everage - Escondido CA
Igor V. Fomenkov - San Diego CA
Palash P. Das - Vista CA
Richard L. Sandstrom - Encinitas CA
Frederick G. Erie - Encinitas CA
John M. Algots - San Diego CA
Assignee:
Cymer, Inc. - San Diego CA
International Classification:
H01S 310
US Classification:
372 20, 372 29011, 372 3801, 372 57
Abstract:
Electric discharge laser with fast chirp correction. Fast wavelength chirp correction equipment includes at least one piezoelectric drive and a fast wavelength detection means and has a feedback response time of less than 1. 0 millisecond. In a preferred embodiment a simple learning algorithm is described to allow advance tuning mirror adjustment in anticipation of the learned chirp pattern. Techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver. In another preferred embodiment chirp correction is made on a pulse-to-pulse basis where the wavelength of one pulse is measured and the wavelength of the next pulse is corrected based on the measurement. This correction technique is able to function at repetition rates as rapid as 2000 Hz and greater.

Laser Wavelength Control Unit With Piezoelectric Driver

View page
US Patent:
6532247, Mar 11, 2003
Filed:
Feb 27, 2001
Appl. No.:
09/794782
Inventors:
Ronald L. Spangler - Arlington MA
Robert N. Jacques - Andover MA
George J. Everage - Escondido CA
Stuart L. Anderson - San Diego CA
Frederick A. Palenschat - Lemon Grove CA
Igor V. Fomenkov - San Diego CA
Richard L. Sandstrom - Encinitas CA
William N. Partlo - Poway CA
John M. Algots - San Diego CA
Daniel J. W. Brown - San Diego CA
Assignee:
Cymer, Inc. - San Diego CA
International Classification:
H01S 322
US Classification:
372 57, 372 20, 372 99, 372102
Abstract:
An electric discharge laser with fast wavelength correction. Fast wavelength correction equipment includes at least one piezoelectric drive and a fast wavelength measurement system and fast feedback response times. In a preferred embodiment, equipment is provided to control wavelength on a slow time frame of several milliseconds, on a intermediate time from of about one to three millisecond and on a very fast time frame of a few microseconds. Techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver for tuning the laser wavelength using a tuning mirror. A preferred control technique is described (utilizing a very fast wavelength monitor) to provide the slow and intermediate wavelength control and a piezoelectric load cell in combination with the piezoelectric driver to provide the very fast (few microseconds) wavelength control.

Laser Wavelength Control Unit With Piezoelectric Driver

View page
US Patent:
6650666, Nov 18, 2003
Filed:
Dec 21, 2001
Appl. No.:
10/027210
Inventors:
Ronald L. Spangler - Arlington MA
Robert N. Jacques - Andover MA
John A. Rule - Hingham MA
Frederick A. Palenschat - Lemon Grove CA
Igor V. Fomenkov - San Diego CA
John M. Algots - San Diego CA
Jacob P. Lipcon - Winchester MA
Richard L. Sandstrom - Encinitas CA
Assignee:
Cymer, Inc. - San Diego CA
International Classification:
H01S 310
US Classification:
372 20, 372 57
Abstract:
An electric discharge laser with fast wavelength correction. Fast wavelength correction equipment includes at least one piezoelectric drive and a fast wavelength measurement system and fast feedback response times. In a preferred embodiment, equipment is provided to control wavelength on a slow time frame of several milliseconds, on a intermediate time from of about one to five milliseconds and on a very fast time frame of a few microseconds. Preferred techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver for tuning the laser wavelength using a tuning mirror. A preferred control technique is described (utilizing a very fast wavelength monitor) to provide the slow and intermediate wavelength control with the combination of a stepper motor and a piezoelectric driver. Very fast wavelength control is provided with a piezoelectric load cell in combination with the piezoelectric driver. Preferred embodiments provide (1) fast feedback control based on wavelength measurements, (2) fast vibration control, (3) active damping using the load cell and an active damping module, (4) transient inversion using feed forward algorithms based on historical burst data.

Laser Spectral Engineering For Lithographic Process

View page
US Patent:
6671294, Dec 30, 2003
Filed:
Jul 27, 2001
Appl. No.:
09/918773
Inventors:
Armen Kroyan - San Diego CA
Ivan Lalovic - San Diego CA
Igor V. Fomenkov - San Diego CA
Palash P. Das - Vista CA
Richard L. Sandstrom - Encinitas CA
John M. Algots - San Diego CA
Khurshid Ahmed - San Diego CA
Assignee:
Cymer, Inc. - San Diego CA
International Classification:
H01S 310
US Classification:
372 20, 372 25, 372 57
Abstract:
An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2. 0 millisecond.

Bandwidth Control Technique For A Laser

View page
US Patent:
6721340, Apr 13, 2004
Filed:
Jun 30, 2000
Appl. No.:
09/608543
Inventors:
Igor V. Fomenkov - San Diego CA
Armen Kroyan - San Diego CA
Jesse D. Buck - San Marcos CA
Palash P. Das - Vista CA
Richard L. Sandstrom - Encinitas CA
Frederick G. Erie - Encinitas CA
John M. Algots - San Diego CA
Gamaralalage G. Padmabandu - San Diego CA
Assignee:
Cymer, Inc. - San Diego CA
International Classification:
H01S 310
US Classification:
372 25, 372 57
Abstract:
A technique for bandwidth control of an electric discharge laser. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection means and a bandwidth control having a time response of less than about 1. 0 millisecond. In a preferred embodiment wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second within a very narrow range of pivot angles to cause a dither in nominal wavelength values to produce a desired effective bandwidth of series of laser pulses.

Four Khz Gas Discharge Laser

View page
US Patent:
6757316, Jun 29, 2004
Filed:
May 11, 2001
Appl. No.:
09/854097
Inventors:
Peter C. Newman - San Diego CA
Thomas P. Duffey - San Diego CA
William N. Partlo - Poway CA
Richard L. Sandstrom - Encinitas CA
Paul C. Melcher - El Cajon CA
David M. Johns - Lakeside CA
Robert B. Saethre - San Diego CA
Vladimir B. Fleurov - Escondido CA
Richard M. Ness - San Diego CA
Curtis L. Rettig - Vista CA
Robert A. Shannon - Ramona CA
Richard C. Ujazdowski - San Diego CA
Shahryar Rokni - Carlsbad CA
Xiaojiang J. Pan - San Diego CA
Vladimir Kulgeyko - San Diego CA
Scott T. Smith - San Diego CA
Stuart L. Anderson - San Diego CA
John M. Algots - San Diego CA
Ronald L. Spangler - Arlington MA
Igor V. Fomenkov - San Diego CA
Assignee:
Cymer, Inc. - San Diego CA
International Classification:
H01S 322
US Classification:
372 57, 372 25, 372 3802, 372 3804, 372 3807, 372 58, 372 59
Abstract:
The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5 mJ or greater. A preferred embodiment is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the discharge region during the approximately 0. 25 milliseconds between pulses.

Laser Spectral Engineering For Lithographic Process

View page
US Patent:
6853653, Feb 8, 2005
Filed:
Dec 21, 2001
Appl. No.:
10/036925
Inventors:
Ronald L. Spangler - Arlington MA, US
Jacob P. Lipcon - Winchester MA, US
John A. Rule - Hingham MA, US
Robert N. Jacques - Andover MA, US
Armen Kroyan - San Diego CA, US
Ivan Lalovic - San Diego CA, US
Igor V. Fomenkov - San Diego CA, US
John M. Algots - San Diego CA, US
Assignee:
Cymer, Inc. - San Diego CA
International Classification:
H01J003/10
US Classification:
372 20, 372 25, 372 30, 372 32
Abstract:
An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2. 0 millisecond.
Control profile
John Martin Algots from Poway, CA, age ~61 Get Report