Jeff (Jeffrey) Roberg - Longmont CO, US Joel Blackburn - Fort Collins CO, US
Assignee:
Advanced Energy Industries, Inc. - Ft. Collins CO
International Classification:
G06F 19/00
US Classification:
702 61
Abstract:
Methods and apparatuses are disclosed for measuring electrical characteristics of power that is applied to a plasma processing chamber when the electrical generator operates in a pulsing mode, when the electrical generator operates in a variable frequency mode, and when the electrical generator operates in both a pulsing mode and in a variable frequency mode concurrently.