Inventors:
Weimin Si - San Ramon CA, US
Ying Hong - Los Gatos CA, US
Zhigang Bai - Milpitas CA, US
Yunhe Huang - Pleasanton CA, US
Fenglin Liu - Milpitas CA, US
Hong Zhang - Fremont CA, US
Jikou Zhou - Pleasanton CA, US
Xiaoyu Yang - Union City CA, US
Yuan Yao - Fremont CA, US
Iulica Zana - Fremont CA, US
Feng Liu - San Ramon CA, US
Ling Wang - Hercules CA, US
Assignee:
Western Digital (Fremont), LLC - Fremont CA
International Classification:
B44C 1/22
US Classification:
216 22, 216 66, 216 67, 216 75
Abstract:
A method for fabricating a magnetic recording transducer having a magnetic writer pole with a short effective throat height is provided. In an embodiment, a writer structure comprising a magnetic writer pole having a trailing bevel and a nonmagnetic stack on the top surface of the writer pole is provided. A dielectric write gap layer comprising alumina is deposited over the trailing bevel section and the nonmagnetic stack; and at least one etch stop layer is deposited over the dielectric write gap layer. A layer of nonmagnetic fill material is deposited over the etch stop layer and to form a nonmagnetic bevel by performing a dry etch process. The etch stop layer(s) are removed from the short throat section; and a trailing shield is deposited over the short throat section, nonmagnetic bevel, and nonmagnetic stack top surface.