Jeffrey A Kaskey

20130321786, Dec 5, 2013

Jun 4, 2013

13/909076

Thomas LAIDIG - Richmond CA, US
Jeffrey KASKEY - Livermore CA, US
Jang Fung CHEN - Cupertino CA, US

G03B 27/42

355 67

A spatial light modulator imaging system is disclosed. The system comprises an illumination module configured to provide illumination light representing data patterns to be imaged by the spatial light modulator imaging system, a projection module configured to project the illumination light to a substrate, and an illumination-projection beam separator coupled between the illumination module and the projection module, where the illumination-projection beam separator is configured to receive the illumination light along an illumination optical axis and transmit the illumination light received to the projection module along a projection optical axis, and where the illumination optical axis and the projection optical axis are substantially parallel to each other.

48811904, Nov 14, 1989

Sep 2, 1986

6/902843

Gordon J. Priatko - Oakland CA
Jeffrey A. Kaskey - San Leandro CA

The United States of America as represented by the United States
Department of Energy - Washington DC

G06F 300

364718

A digitally programmable waveform generator for generating completely arbitrary digital or analog waveforms from very low frequencies to frequencies in the gigasample per second range. A memory array with multiple parallel outputs is addressed; then the parallel output data is latched into buffer storage from which it is serially multiplexed out at a data rate many times faster than the access time of the memory array itself. While data is being multiplexed out serially, the memory array is accessed with the next required address and presents its data to the buffer storage before the serial multiplexing of the last group of data is completed, allowing this new data to then be latched into the buffer storage for smooth continuous serial data output. In a preferred implementation, a plurality of these serial data outputs are paralleled to form the input to a digital to analog converter, providing a programmable analog output.

51668220, Nov 24, 1992

May 22, 1991

7/704256

Gordon J. Priatko - Cupertino CA
Jeffrey A. Kaskey - Livermore CA

The United States of America as represented by the United States
Department of Energy - Washington DC

G02F 111
G02F 133

359287

A light beam frequency comb generator uses an acousto-optic modulator to generate a plurality of light beams with frequencies which are uniformly separated and possess common noise and drift characteristics. A well collimated monochromatic input light beam is passed through this modulator to produce a set of both frequency shifted and unshifted optical beams. An optical system directs one or more frequency shifted beams along a path which is parallel to the path of the input light beam such that the frequency shifted beams are made incident on the modulator proximate to but separated from the point of incidence of the input light beam. After the beam is thus returned to and passed through the modulator repeatedly, a plurality of mutually parallel beams are generated which are frequency-shifted different numbers of times and possess common noise and drift characteristics.

20180024436, Jan 25, 2018

Jun 21, 2017

15/629183

- Santa Clara CA, US
Jeffrey KASKEY - Livermore CA, US

G03F 7/20

Embodiments of the present disclosure generally relate to systems and methods for performing photolithography processes. In one embodiment, a photolithography system includes a plurality of image projection systems each having an extendable lens, and a plate having a plurality of openings. Each extendable lens is configured to be extended through a corresponding opening of the plurality of openings during operation. The plate includes one or more elements disposed adjacent each opening and each lens includes one or more elements formed thereon. The one or more elements formed on the plate and the one or more elements formed on the lens are utilized to measure one or more distances between the lens and the plate. Any deviation of the measured distance from a reference distance indicates that the lens has been shifted. Measures to compensate for the shifting of the lens will be performed.

20170090303, Mar 30, 2017

Sep 30, 2015

14/871066

- Santa Clara CA, US
Jeffrey KASKEY - Livermore CA, US
Thomas LAIDIG - Richmond CA, US

G03F 7/20
F16F 15/00
F16F 15/02
F16F 7/10

Systems and apparatus for performing photolithography processes are described. The system and apparatus may comprise a slab, at least one stage disposed on the slab, and a vibration damping system disposed on the slab, the vibration damping system comprising a weight that is substantially equal to a weight of one of the at least one stage and a substrate that moves simultaneously with movement of the one of the at least one stage.

20160124316, May 5, 2016

Jan 11, 2016

14/993071

- Santa Clara CA, US
Thomas LAIDIG - Richmond CA, US
Jeffrey KASKEY - Livermore CA, US
Jang Fung CHEN - Cupertino CA, US

G03F 7/20

A spatial light modulator imaging system is disclosed. The system comprises an illumination module configured to provide illumination light representing data patterns to be imaged by the spatial light modulator imaging system, a projection module configured to project the illumination light to a substrate, and an illumination-projection beam separator coupled between the illumination module and the projection module, where the illumination-projection beam separator is configured to receive the illumination light along an illumination optical axis and transmit the illumination light received to the projection module along a projection optical axis, and where the illumination optical axis and the projection optical axis are substantially parallel to each other.