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James Castantini Phones & Addresses

  • 39 Montvale Ave APT 12, Woburn, MA 01801
  • Peabody, MA
  • Wilmington, MA
  • 6 Wildwood Dr, Newburyport, MA 01950 (978) 462-6147
  • Salisbury, MA
  • Amesbury, MA

Industries

Semiconductors

Resumes

Resumes

James Castantini Photo 1

James Castantini

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Location:
Greater Boston Area
Industry:
Semiconductors

Publications

Us Patents

Airflow Management For Particle Abatement In Semiconductor Manufacturing Equipment

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US Patent:
8500382, Aug 6, 2013
Filed:
May 22, 2007
Appl. No.:
11/752118
Inventors:
James S. Castantini - Newburyport MA, US
Erin M. Madden - Lynnfield MA, US
Donald N. Polner - Marblehead MA, US
Assignee:
Axcelis Technologies Inc. - Beverly MA
International Classification:
H01L 21/677
US Classification:
414217, 414805, 414935, 118715, 118723 R
Abstract:
An airflow management system and/or method used in particle abatement in semiconductor manufacturing equipment. In particular, the apparatus disclosed is capable of creating and managing a carefully controlled particle free environment for the handling of semiconductor wafers or similar articles. The apparatus is particularly suited to be used as an interface between an equipment front end module (EFEM) and a vacuum loadlock chamber or other such article of process equipment. The apparatus also enables relative motion between enclosures while maintaining a particle free environment utilizing a moving air diffuser mounted to an interface panel.

Apparatus And Methods For Handling Semiconductor Wafers

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US Patent:
20020079714, Jun 27, 2002
Filed:
Oct 1, 2001
Appl. No.:
09/968364
Inventors:
Alan Soucy - Georgetown MA, US
James Castantini - Newburyport MA, US
International Classification:
B66C001/42
US Classification:
294/099100
Abstract:
Disclosed are apparatus and methods used for handling semiconductor wafers or similar articles. In particular, the apparatus disclosed are capable of flexibly gripping items of various shapes and sizes. The apparatus is particularly suited to being used as a robotic end effector for handling wafers using edge-gripping techniques.

Apparatus And Methods For Semiconductor Wafer Processing Equipment

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US Patent:
20040013498, Jan 22, 2004
Filed:
Jun 29, 2001
Appl. No.:
09/897820
Inventors:
Alan Soucy - Georgetown MA, US
James Castantini - Newburyport MA, US
Kevin Hoyt - Sandown NH, US
International Classification:
B65G049/07
US Classification:
414/217000
Abstract:
The invention relates generally to equipment for semiconductor wafer processing, for example, mechanisms and apparatus for handling pods or containers for housing silicon wafers or substrates. The pod may be a front-opening unified pod or similar article and may house a carrier or cassette for holding the wafers or substrates. Additionally, the invention relates generally to an automated system for transporting a plurality of wafers in the pod for processing, loading the pod on the receiving station, sealing the pod against an interface, opening the door of the pod, and shuttling the wafers into and out of a connected clean environment processing station, such as an ion implantation machine, using a robotic device.
James S Castantini from Woburn, MA, age ~65 Get Report