Inventors:
Helmut Mangold - Rodenbach, DE
Ingo Pauli - Mobile AL
Karlheinz Janzon - Gelnhausen, DE
Assignee:
Degussa Aktiengesellschaft - Frankfurt
International Classification:
C04B 3312
Abstract:
Pyrogenic oxides having a BET surface area of between 30 and 150 m. sup. 2 /g have a viscosity of less than 2,500 mPas in an aqueous suspension. They are prepared by setting the hydrogen ratio gamma and the oxygen ratio lambda to less than one in a high-temperature flame hydrolysis. The pyrogenic oxides are employed in the CMP application in the electronics industry.