US Patent:
20140252916, Sep 11, 2014
Inventors:
TRIQUINT SEMICONDUCTOR, INC. - , US
Kurt Steiner - Orlando FL, US
Alan S. Chen - Windermere FL, US
Charles E. Carpenter - Orlando FL, US
Ian Yee - Austin TX, US
Jean Briot - Apopka FL, US
George Grama - Orcutt CA, US
Assignee:
TRIQUINT SEMICONDUCTOR, INC. - Hillsboro OR
International Classification:
H01L 41/047
Abstract:
Embodiments described herein may provide an acoustic wave device, a method of fabricating an acoustic wave device, and a system incorporating an acoustic wave device. The acoustic wave device may include a transducer disposed on a substrate, with a contact coupled with the transducer. The acoustic wave device may further include a wall layer and cap that define an enclosed opening around the transducer. A via may be disposed through the cap and wall layer over the contact, and a top metal may be disposed in the via. The top metal may form a pillar in the via and a pad on the cap above the via. The pillar may provide an electrical connection between the pad and the contact. In some embodiments, the acoustic wave device may be formed as a wafer-level package on a substrate wafer.