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Huaping Wang

from Eden Prairie, MN
Age ~53

Huaping Wang Phones & Addresses

  • 17557 George Moran Dr, Eden Prairie, MN 55347 (952) 937-5802
  • 8819 Knollwood Dr, Eden Prairie, MN 55347 (952) 937-5802
  • Shakopee, MN
  • Chaska, MN
  • Spartanburg, SC
  • Minneapolis, MN
  • Saint Paul, MN
  • 17557 George Moran Dr, Eden Prairie, MN 55347

Work

Company: Entegris 2002 to Jun 2014 Position: Manager, technology characterization

Education

Degree: Master of Business Administration, Masters School / High School: University of Minnesota - Carlson School of Management 2006 to 2011

Skills

Semiconductor Industry • Engineering Management • Filtration • Product Development • Cross Functional Team Leadership • R&D • Contamination Control • Ultrafiltration • Particle Technology • Design of Experiments • Manufacturing • Six Sigma • Characterization • Semiconductors • Spc

Emails

Industries

Semiconductors

Resumes

Resumes

Huaping Wang Photo 1

Senior Engineering Manager

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Location:
Eden Prairie, MN
Industry:
Semiconductors
Work:
Entegris 2002 - Jun 2014
Manager, Technology Characterization

Entegris 2002 - Jun 2014
Senior Engineering Manager

Entegris 2001 - 2002
Test Engineer

Shanghai Architectural Design and Research Institute 1996 - 1998
Mechanical Engineer
Education:
University of Minnesota - Carlson School of Management 2006 - 2011
Master of Business Administration, Masters
University of Minnesota 1998 - 2001
Masters
Tongji University
Master of Science, Masters
Skills:
Semiconductor Industry
Engineering Management
Filtration
Product Development
Cross Functional Team Leadership
R&D
Contamination Control
Ultrafiltration
Particle Technology
Design of Experiments
Manufacturing
Six Sigma
Characterization
Semiconductors
Spc

Business Records

Name / Title
Company / Classification
Phones & Addresses
Huaping Wang
Engineer
Entegris, Inc
Critical Materials Management · Management Services · Building Maintenance Services · Nonclassifiable Establishments · Mfg Plastic Products
101 Peavey Rd, Chaska, MN 55318
102 Peavey Rd, Chaska, MN 55318
430 Railroad Ave, Gaylord, MN 55334
(952) 448-3131, (507) 237-5629

Publications

Us Patents

Reticle Pod

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US Patent:
8613359, Dec 24, 2013
Filed:
Jul 30, 2012
Appl. No.:
13/562087
Inventors:
Steven Kolbow - Chaska MN, US
Kevin McMullen - Shorewood MN, US
Anthony M. Tieben - Jordan MN, US
Matthew Kusz - Minneapolis MN, US
Christian Andersen - Carver MN, US
Huaping Wang - Eden Prairie MN, US
Michael Cisewski - Hutchinson MN, US
Michael L. Johnson - Minneapolis MN, US
David L. Halbmaier - Shorewood MN, US
John Lystad - Bloomington MN, US
Assignee:
Entegris, Inc. - Billerica MA
International Classification:
B65D 85/48
US Classification:
206710, 206723
Abstract:
A dual containment pod having an outer pod and an inner pod that provides support structure and environmental control means. The inner pod includes a base having a flat, polished surface with protrusions upon which the reticle seats and providing a gap between the reticle and the polished surface. The gap separates the reticle from the flat, polished surface of the base and is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. The top cover of the inner pod seats on the polished surface proximate a periphery of the base. Moveable reticle engaging pins on the top cover of the inner pod are engaged by the top cover of the outer container when the inner pod is assembled inside the outer pod providing reticle restraint.

Reticle Pod

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US Patent:
20090301917, Dec 10, 2009
Filed:
Sep 27, 2006
Appl. No.:
12/088120
Inventors:
Steven Kolbow - Chaska MN, US
Kevin McMullen - Shorewood MN, US
Anthony M. Tieben - Jordan MN, US
Matthew Kusz - Minneapolis MN, US
Christian Andersen - Carver MN, US
Huaping Wang - Eden Prairie MN, US
Michael Cisewski - Hutchinson MN, US
Michael L. Johnson - Minneapolis MN, US
David L. Halbmaier - Shorewood MN, US
John Lystad - Bloomington MN, US
Assignee:
ENTEGRIS, INC. - Chaska MN
International Classification:
B65D 85/48
US Classification:
206454
Abstract:
A container that provides support structure and environmental control means including, for example, minimal contact with a wafer or reticle contained therein that cooperates with wafer or reticle to provide a diffusion barrier mitigates against particles settling on a face of the wafer or reticle. The container includes a base having a flat, polished surface with protrusions upon which the wafer or reticle rests. The protrusions are of a geometry, such as a sphere, that imparts minimum contact with the wafer or reticle and suspends the wafer or reticle over the base, providing a gap therebetween. The gap isolates the wafer or reticle from the flat, polished surface of the base, but is dimensioned to inhibit migration of particles into the gap, thereby preventing contamination of sensitive surfaces of the wafer or reticle. Diffusion filters provide pressure equalization without filter media. Moveable reticle pins on the top cover provide reticle restraint. Dual containment pod embodiment provides further isolation and protection.

Reticle Pod Sealing

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US Patent:
20210343563, Nov 4, 2021
Filed:
Apr 29, 2021
Appl. No.:
17/244571
Inventors:
- Billerica MA, US
Huaping WANG - Eden Prairie MN, US
International Classification:
H01L 21/673
B65D 85/48
G03F 1/66
Abstract:
A pod includes a cover with a cover body, a baseplate with a baseplate body, and one or more seal surfaces. The one or more seal surfaces are formed on one or more of the baseplate body and the cover body to provide sealing. A method of producing a reticle pod includes forming one or more seal surfaces on at least one of a baseplate body of a baseplate and a cover body of a cover. The one or more seal surfaces are formed to provide sealing between the baseplate and the cover. Each of the one or more seal surfaces includes a wear-resistant outermost coating with a Rockwell C hardness of about or greater than 70.

Reticle Pod Having Coated Sensor Zones

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US Patent:
20210327734, Oct 21, 2021
Filed:
Apr 16, 2021
Appl. No.:
17/232581
Inventors:
- Billerica MA, US
Huaping WANG - Eden Prairie MN, US
International Classification:
H01L 21/673
C23C 14/34
C23C 16/44
C23C 16/50
C23C 14/22
G03F 1/66
Abstract:
Sensor zones are created on an inner pod of a reticle container using a dry coating method. The sensor zones are discrete zones having a specific spectral reflectivity. The sensor zones are positioned such that they can be read by a tool to determine distance of portions of the pod. The use of discrete zones and a dry coating method for applying those discrete zones overcomes issues with inconsistency and difficulty in cleaning or maintaining reflectance of an inner pod of the reticle container in comparison with inner pods plated entirely with material or other wet coating applied materials.

Reticle Pod With Window

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US Patent:
20210109439, Apr 15, 2021
Filed:
Oct 8, 2020
Appl. No.:
17/066358
Inventors:
- Billerica MA, US
Anthony M. TIEBEN - Belle Plaine MN, US
Brian WISEMAN - Glencoe MN, US
Russ V. RASCHKE - Chanhassen MN, US
Huaping WANG - Eden Prairie MN, US
International Classification:
G03F 1/66
B65D 85/48
H01L 21/673
Abstract:
A door of a reticle pod includes a window having a lens, sidewall, and a ledge. The window may be positioned or affixed internally in a door between the housing and a cover. A compressive seal may be used in conjunction with the window. The sidewalls, the ledge and the compressive seal work together to enable a compression fit in the door while maintained the desired level of protection from external contaminants.

Reticle Support For A Container

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US Patent:
20200144086, May 7, 2020
Filed:
Oct 8, 2019
Appl. No.:
16/596277
Inventors:
- Billerica MA, US
Shawn Daniel EGGUM - Lonsdale MN, US
Russ V. RASCHKE - Chanhassen MN, US
Brian WISEMAN - Glencoe MN, US
Huaping WANG - Eden Prairie MN, US
International Classification:
H01L 21/673
Abstract:
A container for supporting a workpiece, the workpiece including a chamfer around upper and lower edges of the workpiece is disclosed. The container includes a door and a shell capable of coupling with the door to define an isolated environment within the container. The container includes a workpiece support mounted to the door. The workpiece support includes a support post. The support post is configured to support a workpiece at a corner of the workpiece. The support post includes a first sloping wall. A second sloping wall is at a bottom of the first sloping wall. The second sloping side wall is configured to support a workpiece. The first sloping wall and the second sloping wall are oriented with different non-zero slopes.
Huaping Wang from Eden Prairie, MN, age ~53 Get Report