Inventors:
Mark I. Gardner - Cedar Creek TX
Derick Wristers - Austin TX
Jim H. Fulford - Austin TX
Assignee:
Advanced Micro Devices, Inc. - Sunnyvale CA
International Classification:
H01L 21336
Abstract:
A semiconductor device having a liner which defines the depth of an active region and a process for fabricating such a device is disclosed. The use of a liner can, for example, allow the formation of shallower source/drain regions and enhance the performance of the device. In accordance with one aspect of the process, a semiconductor device is formed by forming a gate electrode over a substrate and forming a liner in the substrate adjacent to the gate electrode. An active region is then formed in the substrate, whereby the depth of an active region is defined by the liner. The liner can be formed from several materials including, for example, n-type and p-type dopants and/or oxygen-bearing species.