US Patent:
20200235027, Jul 23, 2020
Inventors:
- Armonk NY, US
Hanhee Paik - Danbury CT, US
Jerry M. Chow - White Plains NY, US
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
H01L 23/367
H01L 39/22
H01L 23/00
H01L 23/544
H01L 39/04
G06N 10/00
H01L 23/498
Abstract:
In an embodiment, a quantum device includes an interposer layer comprising a set of vias. In an embodiment, the quantum device includes a dielectric layer formed on a first side of the interposer, the dielectric layer including a set of transmission lines communicatively coupled to the set of vias. In an embodiment, the quantum device includes a plurality of qubit chips coupled to an opposite side of the interposer layer, each qubit chip of the plurality of qubit chips including: a plurality of qubits on a first side of the qubit chip and a plurality of protrusions on a second side of the qubit chip. In an embodiment, the quantum device includes a heat sink thermally coupled with the plurality of qubit chips, the heat sink comprising a plurality of recesses aligned with the plurality of protrusions of the plurality of qubit chips.