Guofan F Ye

20050201038, Sep 15, 2005

Jan 12, 2005

11/035048

Yi Xiang Wang - Fremont CA, US
Guofan Ye - South San Francisco CA, US

Hermes-Microvision, Inc. - Hsinchu

H02H001/00

361212000

Method and apparatus for removing and neutralizing charges. The method includes loading a structure into a chamber. The structure includes a first surface and a plurality of charges away from the first surface. Additionally, the method includes supplying a first ionized gas to the first surface of the structure, and radiating the structure with a first ultraviolate light. The supplying a first ionized gas and the radiating the structure with a first ultraviolate light are performed simultaneously for a first period of time.

20200335298, Oct 22, 2020

Apr 17, 2020

16/852325

- Veldhoven, NL
Yanqiu WANG - Fremont CA, US
Xiaodong HE - Beijing, CN
Guofan YE - South San Francisco CA, US

H01J 37/24
H01J 37/141

Disclosed among other aspects is a power supply such as may be used in a charged particle inspection system. The power supply includes a direct current source such as a programmable linear current source connected to a controlled voltage source where the control signal for the controlled voltage source is derived from a measured voltage drop across the direct current source.