Inventors:
Michael Lee - High Wycombe, GB
Steven Wright - Northchurch, GB
Philip Judge - Richmond, GB
Craig Wilson - Livermore CA, US
Gregory Cestra - Pleasanton CA, US
Derek Bowers - Los Altos Hills CA, US
Assignee:
Analog Devices, Inc. - Norwood MA
International Classification:
H01C 1/012
Abstract:
A thin film composition is made from silicon, an insulator such as alumina or silicon dioxide, and at least one additional material such as chromium, nickel, boron and/or carbon. These materials are combined to provide a thin film having a ρ of at least 0. 02 Ω-cm (typically 0. 02-1. 0 Ω-cm), and a TCR of less than 1000 ppm/ C. (typically less than 300 ppm/ C. ). A sheet resistance of at least 20 kΩ/□ may also be obtained. The resulting thin film is preferably at least 200 thick, to reduce surface scattering conduction currents.