Inventors:
Chun Christine Dong - Macungie PA, US
Wayne Thomas McDermott - Fogelsville PA, US
Alexander Schwarz - Bethlehem PA, US
Gregory Khosrov Arslanian - Pipersville PA, US
Richard E. Patrick - Tamaqua PA, US
Gary A. Orbeck - Windham NH, US
Assignee:
Air Products and Chemicals, Inc. - Allentown PA
International Classification:
B23H 9/00
US Classification:
216 13, 216 63, 216 76, 216 78
Abstract:
An apparatus and a method comprising same for removing metal oxides from a substrate surface are disclosed herein. In one particular embodiment, the apparatus comprises an electrode assembly that has a housing that is at least partially comprised of an insulating material and having an internal volume and at least one fluid inlet that is in fluid communication with the internal volume; a conductive base connected to the housing comprising a plurality of conductive tips that extend therefrom into a target area and a plurality of perforations that extend therethrough and are in fluid communication with the internal volume to allow for a passage of a gas mixture comprising a reducing gas.