Inventors:
Gordon M. Grivna - Mesa AZ, US
Assignee:
Semiconductor Components Industries, L.L.C. - Phoenix AZ
International Classification:
H01L 27/108
US Classification:
257302, 257297, 257298, 257314, 257315, 438268, 438269, 438273
Abstract:
A transistor () is formed in a semiconductor substrate () whose top surface () is formed with a pedestal structure (). A conductive material () is disposed along a side surface () of the pedestal structure to self-align an edge of a first conduction electrode () of the transistor. A dielectric spacer () is formed along a side surface () of the conductive material to self-align a contact area () of the first conduction electrode.