Inventors:
Yi Cui - Sunnyvale CA, US
Jia Zhu - Stanford CA, US
Ching-Mei Hsu - Stanford CA, US
Stephen T. Connor - San Francisco CA, US
Zongfu Yu - Stanford CA, US
Shanhui Fan - Stanford CA, US
George Burkhard - Palo Alto CA, US
Assignee:
The Board of Trustees of the Leland Stanford Junior University - Palo Alto CA
International Classification:
H01L 21/3065
Abstract:
A method for forming a substrate comprising nanometer-scale pillars or cones that project from the surface of the substrate is disclosed. The method enables control over physical characteristics of the projections including diameter, sidewall angle, and tip shape. The method further enables control over the arrangement of the projections including characteristics such as center-to-center spacing and separation distance.