Inventors:
Gennady Ozeryansky - Cheshire CT, US
International Classification:
H01L 21/00
C23F 1/00
US Classification:
216 11, 216 2, 216 7, 216 8, 216 9, 430320, 428606, 428611, 428614
Abstract:
A method of fabricating microstructural components, microparts assemblies and microparts is disclosed. The method includes fabricating a unidirectional metal matrix composite made of materials selected to allow precise etching of different structural elements of the given composite without damage to each other. Cutting a composite to form slices or sections. Etching a matrix entirely out will produce wide assortment of microparts. Partial removal of matrix will form an array of microprotrusions protruding from a substrate. Etching out the microprotrusions cores will form hollow microprotrusions. The method of invention is suitable for fabricating of variety of microcomponents. For example: microneedles—a medical microdevice component having micron features, arrays of high strength micropins and micropunches, and precisely controlled unique microstructural surfaces.