Inventors:
Susan D. Strothers - Spokane WA
Robert G. Delano - Valleyford WA
Garold L. Steed - Spokane WA
Assignee:
Johnson Matthey Inc. - Valley Forge PA
International Classification:
C23C 1434
B23K 1500
Abstract:
Described is a method of manufacturing a sputtering target assembly is that minimizes distortion during manufacture and a novel target assembly so produced. The method involves positioning a backing member in an external shoulder formed in the target member, electron beam welding mating surfaces and machining the interior surface of the welded assembly to provide a coextensive surface along the inner surfaces of the target and backing members. The resulting target assembly can withstand high water pressure and high sputter power levels.