Inventors:
William V. McLevige - Plano TX
Walter M. Duncan - Dallas TX
Friedrich H. Doerbeck - Dallas TX
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
H01L 21265
H01L 2948
Abstract:
Bipolar transistors and other electronic structures are fabricated on a gallium arsenide (GaAs) substrate to form an integrated circuit device. This process is made possible by development of an ion implant technique which uses an acceptor material to create a P type region, boron or protons to create insulating regions, and silicon or selenium to create an N type region. The process avoids the difficult problems encountered in diffusion methods, and, due to the precise control available with the ion implant method, makes possible the fabrication of IC quality transistors consistently over a substrate. This same control enables the fabrication of integrated circuits with improved device packing density and reduced parasitic parameters.