Resumes
Resumes
Eric Trumbauer Phones & Addresses
-
5194 Summerview Ln, Celina, TX 75009
-
1021 Willowgate Dr, Prosper, TX 75078 (972) 347-6757
-
Little Elm, TX
-
11452 Diablo Grande Dr, Frisco, TX 75035 (972) 335-0278 (972) 335-6956
-
The Colony, TX
-
Denton, TX
-
State College, PA
-
Dallas, TX
-
Sherman, TX
-
Colton, TX
-
11452 Diablo Grande Dr, Frisco, TX 75035 (214) 632-2854
Work
Position:
Building and Grounds Cleaning and Maintenance Occupations
Emails
Publications
Us Patents
Post Metal Etch Clean Process Using Soft Mask
View pageUS Patent:
20020126368, Sep 12, 2002
Filed:
Dec 31, 2001
Appl. No.:
10/036697
Inventors:
David Smith - Plano TX, US
Eric Trumbauer - Frisco TX, US
Ronald Roth - McKinney TX, US
Brian Scott - Sachse TX, US
Eric Trumbauer - Frisco TX, US
Ronald Roth - McKinney TX, US
Brian Scott - Sachse TX, US
International Classification:
G02B026/00
US Classification:
359/291000, 359/290000
Abstract:
A method of patterning a metal layer that cleans the residue from a metal etch process without removing a photoresist etch mask. The method is particularly useful for the fabrication of micromirror devices, or other MEMS devices that use photoresist spacer layers. A photoresist layer is spun on to the mirror metal layer in step The photoresist is patterned and developed in step to form openings to the metal layer. The openings define areas where the mirror metal layer will be removed. The patterned photoresist is inspected in step The mirror metal layer is etched in step using the patterned photoresist layer as an etch mask. After the mirror metal has been etched, the webbing and other residues are removed in a clean up process that uses photoresist developer as a solvent to remove the webbing. After the developer clean up process, the mirrors are inspected in step to verify the proper gaps have been etched between the mirrors and the removal of the mirror etch residue. A photoresist saw prep coating is then spun onto the wafer in step the wafers are sawn in step and scrubbed in step before the mirrors are undercut in step The undercut process removes the photoresist spacer layers on which the hinge yoke and mirror have been fabricated, allowing mirrors to rotate about the torsion hinges.