Inventors:
Edward J. Relder - Garland TX
International Classification:
H01J 912
H01J 926
Abstract:
A CCD (12) or other photoelectronic device is bonded to an image tube housing (26) to provide a digital output from the image tube (19). The housing (26) and cathode (19) are degassed in chambers (44 and 42) at a high temperature and low pressure. A load lock chamber (46) is degassed and evacuated to remove contaminants. After cooling the chambers (42, 44 and 46) the CCD (12) is placed in the load lock chamber (46) which is then sealed and evacuated. After evacuation, a gate valve (54) is opened between the load lock chamber and the housing chamber (44) and the CCD is placed on a press station (63) of a metal bellow (64). The metal bellow (64) is extended to push the CCD (12) against an indium seal ring (36) on the housing (26), creating a seal between the CCD (12) and the housing (26).