US Patent:
20170072081, Mar 16, 2017
Inventors:
- SAN DIEGO CA, US
JEFFREY J. SPIEGELMAN - SAN DIEGO CA, US
RUSSELL J. HOLMES - SAN DIEGO CA, US
EDWARD HEINLEIN - SAN DIEGO CA, US
ZOHREH SHAMSI - SAN DIEGO CA, US
CHRISTOPHER RAMOS - BONITA CA, US
ALEX DEPTALA - SPRING VALLEY CA, US
JAMES HOGAN - CORONADO CA, US
Assignee:
RASIRC, INC. - SAN DIEGO CA
International Classification:
A61L 2/20
C12Q 1/68
Abstract:
Methods and delivery systems for providing a gas phase of a multi-component liquid source for delivery to a critical process application are provided. The methods include concentration of a component of the liquid source which is less volatile than water for delivery of a gas stream comprising the less volatile component to a critical process application. Critical process applications include decontamination and microelectronic processing applications.