Inventors:
Larry John Dibattista - Cupertino CA, US
Duncan Packard Gurley - Cupertino CA, US
Assignee:
ADVANTEST (SINGAPORE) PTE. LTD. - Singapore
International Classification:
G01R 1/04
G06F 17/50
H01L 21/66
US Classification:
32475024, 257 48, 716119, 32475603
Abstract:
A semiconductor device includes a first wafer having i) a plurality of semiconductor dies, ii) a plurality of scribe lines adjacent one or more of the semiconductor dies, iii) a test access interface positioned in one or more of the scribe lines, wherein the test access interface has a first plurality of through-substrate conductors with a standardized physical layout, and iv) electrical couplings between at least some of the through-substrate conductors and at least one of the semiconductor dies. Methods, apparatus and systems for testing this and other types of semiconductor devices are also disclosed.