Inventors:
Dominique Gignoux - Bethesda MD
Russell Murray - Laurel MD
Assignee:
Data Measurement Corporation - Gaithersburg MD
International Classification:
G01N 2316
G01B 1502
Abstract:
This invention applies to thickness gauges consisting of a radiation source producing a beam aimed at a detector. Whenever a material to be gauged obstructs the radiation beam, the intensity received by the detector (detector output) varies and said variation can be translated into a thickness measurement. Standards are used for calibration. This invention provides computer means and methods that provide better measurements by using a function relating the thickness to the detector output in a large range and independently of random inaccuracies of the standards.