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Dieter Rathei Phones & Addresses

  • Glen Allen, VA
  • Richmond, VA
  • Carrollton, TX
  • Paris, TX
  • Wappingers Falls, NY

Publications

Us Patents

System And Method For Determining Yield Impact For Semiconductor Devices

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US Patent:
20020032888, Mar 14, 2002
Filed:
Jan 11, 1999
Appl. No.:
09/228178
Inventors:
REINHOLD OTT - RICHMOND VA, US
HERBERT LAMMERING - GLEN ALLEN VA, US
DIETER RATHEI - GLEN ALLEN VA, US
International Classification:
G01R031/28
US Classification:
714/724000
Abstract:
A method for determining yield impact of process steps for semiconductor wafers having a plurality of dies includes the steps of correlating defects on the dies to electrical failures on the dies to determine hits on the dies, computing kill rates for the dies based on hits for each inspection process, determining a number of dies to be killed by considering kill rates for the dies with hits to weight the defects of each die and determining a yield loss for each inspection process based on the number of dies to be killed and a total number of dies on the semiconductor wafer. A system is also included.
Dieter Rathei from Glen Allen, VA, age ~54 Get Report