Inventors:
Dennis Andrew Legal - Westlake Village CA
Assignee:
Teradyne, Inc. - Boston MA
International Classification:
G01R 3102
Abstract:
A configurable probe card for use with a tester for semiconductor devices. The probe is configurable so that the contact pattern during each touch down can be different. In this way, the number of devices being tested simultaneously can be maximized. The configurable probe card increases the utilization of the tester, thereby allowing increased throughput in the semiconductor manufacturing process or, alternatively, decreasing the overall cost of testing each device.