US Patent:
20100297557, Nov 25, 2010
Inventors:
James F. Cameron - Cambridge MA, US
Jin Wuk Sung - Northborough MA, US
John P. Amara - Reading MA, US
Greogory P. Prokopowicz - Worcester MA, US
David A. Valeri - Leominster MA, US
Libor Vyklicky - Yorktown Heights NY, US
Wenjie Li - Poughkeepsie NY, US
Pushkara R. Varanasi - Poughkeepsie NY, US
Irene Y. Popova - Beacon NY, US
Assignee:
Rohm and Haas Electronic Materials LLC - Marlborough MA
International Classification:
G03F 7/004
C08G 73/10
Abstract:
Organic coating compositions, particularly antireflective coating compositions, are provided that can be developed with an aqueous alkaline developer, including in a single step during development of an overcoated photoresist layer. Preferred coating compositions comprise a tetrapolymer that comprises at least four distinct functional groups.