US Patent:
20180047563, Feb 15, 2018
Inventors:
- Tokyo, JP
Rodney L. Robison - East Berne NY, US
Ronald Nasman - Averill Park NY, US
David Travis - Albany NY, US
James Grootegoed - Wynantskill NY, US
David Hetzer - Schenectady NY, US
Lior Huli - Delmar NY, US
Joshua S. Hooge - Austin TX, US
International Classification:
H01L 21/027
H01L 21/02
H01L 21/66
H01L 21/67
Abstract:
Techniques herein include a bladder-based dispense system using an elongate bladder configured to selectively expand and contract to assist with dispense actions. This dispense system compensates for filter-lag, which often accompanies fluid filtering for microfabrication. This dispense system also provides a high-purity and high precision dispense unit. A meniscus sensor monitors a position of a meniscus of process fluid at a nozzle. The elongate bladder unit is used to maintain a position of the meniscus at a particular location by selectively expanding or contracting the bladder, thereby moving or holding a meniscus position. Expansion of the elongate bladder is also used for a suck-back action after completing a dispense action.
