Inventors:
Bradley Morgan Haskett - Allen TX, US
John Patrick O'Connor - Fort Worth TX, US
Steven E. Smith - Coppell TX, US
Mark Myron Miller - Plano TX, US
Ivan Kmecko - Dallas TX, US
Jwei Wien Liu - Plano TX, US
Edward Carl Fisher - Lucas TX, US
Frank O. Armstrong - Wylie TX, US
Daniel C. Estabrook - Plano TX, US
Jeffrey E. Faris - Richardson TX, US
Assignee:
Texas Instruments Incorporated - Dallas TX
International Classification:
H01L 21/50
H01L 21/48
H01L 21/44
H01L 23/29
H01L 23/31
US Classification:
438106, 438124, 438 27, 257E23118, 257E23124
Abstract:
An improved window frame and window piece for a micromirror assembly is disclosed herein. The window frame includes a stress-relieving contour positioned in the middle of the frame that can absorb the mechanical stresses applied to the window frame from the ceramic base and from the window piece. The window frame may be comprised of a single piece of sheet metal that has been stamped to include a stress-relieving contour. The stress-relieving contour may be comprised of a variety of shapes, including a “U” shape, an inverted “U” shape, a curved step shape, or other combinations thereof.