Inventors:
- Fort Washington PA, US
Daniel P. Buergi - Chalfont PA, US
Horst Clauberg - Warwick PA, US
Matthew B. Wasserman - Philadelphia PA, US
International Classification:
H01L 23/00
H01L 21/683
Abstract:
A method of operating a bonding machine is provided. The method includes the steps of: (a) carrying a semiconductor element with a transfer tool; and (b) transferring the semiconductor element from the transfer tool to a bonding tool of the bonding machine without the transfer tool and the bonding tool contacting the semiconductor element at the same time.