US Patent:
20100008016, Jan 14, 2010
Inventors:
Jaime Onate - Fremont CA, US
Michael Kilgore - Sunnyvale CA, US
Jimmy Lam - Fremont CA, US
Timothy W. Kueper - Santa Clara CA, US
Dan Ye - Sunnyvale CA, US
Assignee:
NOVELLUS SYSTEMS, INC. - San Jose CA
International Classification:
H01L 21/683
Abstract:
A semiconductor workpiece processing system for treating a workpiece, such as a semiconductor wafer, is provided. A related operating control method is also provided. The system includes an electrostatic chuck configured to receive a workpiece, and a clamping voltage power supply coupled to the electrostatic chuck. The electrostatic chuck has a clamping electrode assembly, and the clamping voltage power supply is coupled to the clamping electrode assembly. The clamping voltage power supply includes a direct current (DC) voltage generator configured to generate a DC clamping voltage for the clamping electrode assembly, an alternating current (AC) voltage generator configured to generate an AC excitation signal for the clamping electrode assembly, and a processing architecture coupled to the clamping electrode assembly. The processing architecture is configured to analyze attributes of a workpiece presence signal obtained in response to the AC excitation signal, and, based on the attributes, verify proper/improper positioning of the workpiece relative to the electrostatic chuck.
