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Chunhua Song

from Jamesville, NY
Age ~48
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Related to:
Li I Wang, 63Yiting Chen, 52Lei Chen, 45Ying Zhang, 59Chao Jung ChenWenhao Chen, 49Hao Hao, 38Shichang Song
Connected to:
Aeda H Song, 72Agatha Song, 89Aitong Song, 36Andi J Song, 50Andre Song, 40Anna Song, 42Baogang Song, 54Baozhen Song, 47Beatrice P Song, 64Bianca Song, 41

Chunhua Song Phones & Addresses

  • 4598 Providence Rd, Jamesville, NY 13078
  • Syracuse, NY

Work

Company: Syracuse university May 2004 Position: Research assistant

Education

School / High School: Nanjing University Sep 2001 Specialities: M.S. in Physics

Skills

Thin Films • Photolithography • Labview • Simulations • Materials • Physics • Uhv • Vacuum • Nanotechnology • Science • Latex • Spectroscopy • Afm

Languages

English • Mandarin

Industries

Nanotechnology

Resumes

Resumes

Chunhua Song Photo 1

Physicist

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Location:
Syracuse, NY
Industry:
Nanotechnology
Work:
INFICON - Syracuse, New York Area since Jan 2012
Physicist
Syracuse University May 2005 - Dec 2011
Research Assistant
Syracuse University Jan 2005 - Jan 2006
Teaching Assistant
Nanjing University Sep 2001 - Jul 2004
Research Assistant
SuZhou No.3 high school Jul 1999 - Jul 2001
Physics Teacher
Education:
Syracuse University 2004 - 2011
Ph.D, Physics Nanjing University 2001 - 2004
B.S, Material Science and Engineering Nanjing University
M.S, Physics
Skills:
Thin Films
Photolithography
Labview
Simulations
Materials
Physics
Uhv
Vacuum
Nanotechnology
Science
Latex
Spectroscopy
Afm
Languages:
English
Mandarin
Chunhua Song Photo 2

Chunhua Song Syracuse, NY

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Work:
Syracuse University

May 2004 to 2000
Research Assistant
Syracuse University
Syracuse, NY
Jan 2005 to Jan 2006
Teaching Assistant
Nanjing University, Nanjing, Jiangsu, China

Sep 2001 to Jul 2004
Research Assistant
SuZhou No.3 high school

Jul 1999 to Jul 2001
Physics Teacher
Education:
Nanjing University
Sep 2001 to Jul 2004
M.S. in Physics
Material Science and Engineering Nanjing University
Sep 1995 to Jul 1999
B.S. in Nanjing, China
Physics Syracuse University
Syracuse, NY
Ph.D.

Publications

Us Patents

Unconsumed Precursor Monitoring

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US Patent:
20220285184, Sep 8, 2022
Filed:
May 16, 2022
Appl. No.:
17/744856
Inventors:
- East Syracuse NY, US
Chunhua Song - Jamesville NY, US
Steve James Lakeman - Newbury Park CA, US
Assignee:
INFICON, Inc. - East Syracuse NY
International Classification:
H01L 21/67
C23C 16/44
C23C 16/455
C23C 16/52
G01N 29/02
G01N 29/036
H01L 21/285
H01L 21/66
Abstract:
A monitoring device for monitoring a fabrication process in a fabrication system. The monitored fabrication system includes a process chamber and a plurality of flow components. A quartz crystal microbalance (QCM) sensor monitors one flow component of the plurality of flow components of the fabrication system and is configured for exposure to a process chemistry in the one flow component during the fabrication process. A controller measures resonance frequency shifts of the QCM sensor due to interactions between the QCM sensor and the process chemistry in the one flow component during the fabrication process. The controller determines a parameter of the fabrication process in the process chamber as a function of the measured resonance frequency shifts of the QCM sensor within the one flow component.

Unconsumed Precursor Monitoring

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US Patent:
20200176291, Jun 4, 2020
Filed:
Aug 24, 2018
Appl. No.:
16/633025
Inventors:
- East Syracuse NY, US
Chunhua Song - Jamesville NY, US
Steve James Lakeman - Newbury Park CA, US
Assignee:
INFICON. Inc. - East Syracuse NY
International Classification:
H01L 21/67
G01N 29/036
G01N 29/02
H01L 21/285
H01L 21/66
C23C 16/44
C23C 16/455
C23C 16/52
Abstract:
A monitoring device for monitoring a fabrication process in a fabrication system. The monitored fabrication system includes a process chamber and a plurality of flow components. A quartz crystal microbalance (QCM) sensor monitors one flow component of the plurality of flow components of the fabrication system and is configured for exposure to a process chemistry in the one flow component during the fabrication process. A controller measures resonance frequency shifts of the QCM sensor due to interactions between the QCM sensor and the process chemistry in the one flow component during the fabrication process. The controller determines a parameter of the fabrication process in the process chamber as a function of the measured resonance frequency shifts of the QCM sensor within the one flow component.
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Chunhua Song from Jamesville, NY, age ~48 Get Report