Inventors:
Christopher H. Galfo - San Jose CA
Ashok L. Nalamwar - Milpitas CA
Assignee:
Fairchild Camera & Instrument Corp. - Mountain View CA
International Classification:
B05D 304
B05D 306
Abstract:
A method for preventing the post-etch corrosion of aluminum or aluminum alloy film which has been etched utilizing chlorinated plasma wherein the etched film is exposed to fluorinated plasma.