Inventors:
Xiaoming Chen - Austin TX
Charles H. Howard - Austin TX
Franklin Dean Kalk - Austin TX
Kong Son - Fremont CA
Paul Chipman - Pflugerville TX
Assignee:
DuPont Photomasks, Inc. - Round Rock TX
International Classification:
G03F 900
US Classification:
430 30, 430 5, 702 34, 702 35, 702 94, 702 95, 702 82, 356237, 356239, 382152
Abstract:
A method and apparatus evaluates the runability of a photomask inspection tool that inspects plural sets of die, each die having a standard simulated industrial device feature at plural technology nodes. A technology node size is determined for each feature at which inspection by the tool provides no false detection of faults. A sensitivity module included on a photomask test plate along with a runability module allows determination of inspection tool sensitivity and runability in a single test sequence.
