Inventors:
Charles M. Newton - Palm Bay FL
Raymond C. Rumpf - Melbourne FL
Carol Gamlen - Melbourne FL
Assignee:
Harris Corporation - Melbourne FL
International Classification:
H04B 338
US Classification:
455 661, 455 74, 455344, 430311, 333204, 428210, 428213, 438 48
Abstract:
A microelectromechanical structure and method is disclosed. A ceramic substrate preferably is formed from low temperature co-fired ceramic sheets. A low loss photodefinable dielectric planarizing layer is formed over one surface of the ceramic substrate. This layer can be a sacrificial layer or a subsequent sacrificial layer added. A photodefined conductor is printed over the low loss dielectric planarizing layer and formed with the sacrificial layer into a structural circuit component. In one aspect of the invention, a switch is formed with a biasing actuator and deflectable member formed over the biasing actuator and moveable into open and closed circuit positions.