Inventors:
Nicholas Watts - Phoenix AZ, US
Eric Palmer - Tempe AZ, US
Jui Lim - Chandler AZ, US
Todd Myers - Gilbert AZ, US
Boonsri Wangmaneerat - Chandler AZ, US
International Classification:
H01L023/04
H01L021/44
US Classification:
257698000, 257686000, 438109000, 257688000, 438117000
Abstract:
In some embodiments, a method includes providing a substrate, providing a coverlay blank, laminating the coverlay blank to the substrate, and forming at least one opening in the coverlay blank by photolithography.