Inventors:
Yowjuang William Liu - San Jose CA
Assignee:
Advanced Micro Devices, Inc. - Sunnyvale CA
International Classification:
H01L 2976
US Classification:
257330, 257331, 257332, 257333, 257334
Abstract:
A metal oxide semiconductor (MOS) device includes a silicon substrate, source and drain regions having a predetermined junction depth (d ) relative to the surface of the silicon substrate, and a gate region having a contoured channel region formed by a locally-oxidized silicon (LOCOS) structure grown to a predetermined thickness. The contoured channel region has a substantially flat surface, extending into the silicon substrate by a predetermined depth (d ), and contoured edges. The depth (d ) of the substantially flat surface of the contoured channel region is greater than or equal to the depth of the junction depth (d ) of the source and drain regions, such that the contoured channel region is lower than or equal to the source and drain regions relative to the surface of the silicon substrate. The lower depth of the contoured channel region relative to the source and drain regions decouples shallow junction requirements from the channel length scaling. The effectively elongated channel length allows easier device optimization.