Inventors:
John K. Lee - Meridian ID
Behnam Moradi - Boise ID
Michael J. Westphal - Boise ID
Assignee:
Micron Technology, Inc. - Boise ID
International Classification:
H01L 218238
Abstract:
CMOS devices and process for fabricating low voltage, high voltage, or both low voltage and high voltage CMOS devices are disclosed. According to the process, p-channel stops and source/drain regions of PMOS devices are implanted into a substrate in a single step. Further, gates for both NMOS and PMOS devices are doped with n-type dopant and NMOS gates are self-aligned.