Inventors:
- Santa Clara CA, US
Marian MANKOS - San Jose CA, US
Dennis CIPLICKAS - San Jose CA, US
Christopher HESS - Belmont CA, US
Jeremy CHENG - San Jose CA, US
Balasubramanian MURUGAN - San Ramon CA, US
Qi HU - Cypress CA, US
International Classification:
G01R 31/306
G01R 31/265
G01R 31/302
Abstract:
Systems, devices, and methods for performing a non-contact electrical measurement (NCEM) on a NCEM-enabled cell included in a NCEM-enabled cell vehicle may be configured to perform NCEMs while the NCEM-enabled cell vehicle is moving. The movement may be due to vibrations in the system and/or movement of a movable stage on which the NCEM-enabled cell vehicle is positioned. Position information for an electron beam column producing the electron beam performing the NCEMs and/or for the moving stage may be used to align the electron beam with targets on the NCEM-enabled cell vehicle while it is moving.