Inventors:
Babak JAMSHIDI - Berkeley CA, US
Albert P. Pisano - Danville CA, US
International Classification:
G01B 7/16
H05K 13/00
Abstract:
Provided are capacitive strain sensors. In certain embodiments, the capacitive strain sensor can continuously and accurately measure strain in corrosive ambient conditions and may operate up to 370 C. or more in air. The sensor includes a differential capacitor that includes a bending beam structure. In some instances, the sensor is configured to increase the effect of strain in a substrate along a sensing axis while attenuating the effect of cross-axis strain. Also provided are methods of making the capacitive strain sensors, e.g., using Micro-Electro-Mechanical System (MEMS) fabrication techniques, and methods of using the capacitive strain sensors.