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Anlun L Tang

from Pleasanton, CA
Age ~62

Anlun Tang Phones & Addresses

  • 6342 Camino Del Lago, Pleasanton, CA 94566 (925) 462-6911
  • Kent, OH
  • Franklin, MA
  • New York, NY
  • Framingham, MA
  • Milpitas, CA
  • Alameda, CA
  • 6342 Camino Del Lago, Pleasanton, CA 94566

Work

Position: Professional/Technical

Education

Degree: High school graduate or higher

Emails

Publications

Us Patents

Rapid Acquisition Ellipsometry

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US Patent:
7796259, Sep 14, 2010
Filed:
Jul 9, 2008
Appl. No.:
12/170234
Inventors:
Anlun Tang - Pleasanton CA, US
Yingwu Lian - Artesia CA, US
Assignee:
WeiFour, Inc. - Milpitas CA
International Classification:
G01J 4/00
US Classification:
356366, 356364
Abstract:
Disclosed embodiments pertain to optical assemblies which impart a spatially dependent rotation to linearly polarized light. A pair of optical assemblies may be used to apply a spatially dependent rotation to linearly polarized light in the region between the optical assemblies, and produce a spatially independent rotation after traversing the second optical assembly. A pair of optical assemblies may be used in combination with a wave plate to allow a determination of the Stokes parameters of an elliptically polarized beam of light.

Uv Compatible Programmable Spatial Filter

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US Patent:
20030184739, Oct 2, 2003
Filed:
Jun 4, 2002
Appl. No.:
10/163398
Inventors:
Dieter Wilk - San Jose CA, US
Anlun Tang - Pleasanton CA, US
Eric Vella - Mountain View CA, US
J. Runyon - Fremont CA, US
Jamie Sullivan - Sunnyvale CA, US
Assignee:
KLA-Tencor Technologies Corporation
International Classification:
G01N021/00
US Classification:
356/237100
Abstract:
Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 per square.

Two-Dimensional Uv Compatible Programmable Spatial Filter

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US Patent:
20040001198, Jan 1, 2004
Filed:
Jun 4, 2002
Appl. No.:
10/163762
Inventors:
Dieter Wilk - San Jose CA, US
Anlun Tang - Pleasanton CA, US
Eric Vella - Mountain View CA, US
Rex Runyon - Fremont CA, US
Jamie Sullivan - Sunnyvale CA, US
Ralph Johnson - Los Gatos CA, US
Assignee:
KLA-Tencor Technologies Corporation
International Classification:
G01N021/00
US Classification:
356/237300
Abstract:
Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 per square. The PSF provides selective filtering in two directions. In other words, the PSF provides two dimensional filtering.
Anlun L Tang from Pleasanton, CA, age ~62 Get Report