Inventors:
Jonathan Gorrell - Gainesville FL, US
Mark Davidson - Florahome FL, US
Jean Tokarz - Hawthorne FL, US
Michael E. Maines - Gainesville FL, US
Andres Trucco - Gainesville FL, US
Paul Hart - Kansas City MO, US
Assignee:
Virgin Islands Microsystems, Inc. - Saint Thomas
International Classification:
H01L 21/461
H01L 21/302
US Classification:
205118, 2042294, 216 24, 438706, 257E21311
Abstract:
We describe an ultra-small structure and a method of producing the same. The structures produce visible light of varying frequency, from a single metallic layer. In one example, a row of metallic posts are etched or plated on a substrate according to a particular geometry. When a charged particle beam passed close by the row of posts, the posts and cavities between them cooperate to resonate and produce radiation in the visible spectrum (or even higher). A plurality of such rows of different geometries are formed by either etching or plating from a single metal layer such that the charged particle beam will yield different visible light frequencies (i. e. , different colors) using different ones of the rows.