Inventors:
Bradley Staley - Austin TX, US
Gregory Bogush - Aurora IL, US
Jeffrey Chamberlain - Aurora IL, US
Paul Feeney - Aurora IL, US
Alicia Walters - Naperville IL, US
Steven Grumbine - Aurora IL, US
Brian Mueller - Chandler AZ, US
David Schroeder - Aurora IL, US
International Classification:
B08B003/04
B08B009/20
Abstract:
The present invention provides a method of polishing and/or cleaning a substrate using a multi-component polishing and/or cleaning composition, wherein the components of the polishing and/or cleaning composition are mixed at the point-of-use or immediately before delivery to the point-of-use. The present invention also provides a method of polishing and/or cleaning more than one substrate simultaneously using a single apparatus, wherein a different polishing or cleaning composition is delivered to each substrate.