Alan V Liu

6620296, Sep 16, 2003

Jul 13, 2001

09/905263

James Van Gogh - Sunnyvale CA
Jim Thompson - Palo Alto CA
Marc Schweitzer - San Jose CA
Yoichiro Tanaka - Sunnyvale CA
Alan Liu - Mountain View CA
Anthony CT Chan - Los Altos Hills CA
Karl Brown - Mountain View CA
John C. Forster - San Francisco CA

Applied Materials, Inc. - Santa Clara CA

C23C 1434

2041921, 20419212, 20429812, 20429813

An apparatus for a physical vapor deposition system includes a target having a sidewall having an undercut thereon defining a net erosion area and a net redeposition area.

6730174, May 4, 2004

Mar 6, 2002

10/093252

Alan B. Liu - Mountain View CA
Ilya Lavitsky - San Francisco CA
Michael Rosenstein - Sunnyvale CA

Applied Materials, Inc. - Santa Clara CA

C23C 1600

118715, 1563453, 20429811, 118723 R

An apparatus for replacing consumables of a vacuum chamber. A unitary removable shield assembly is provided to quickly replace consumables such as a shield. The shield assembly can include an upper adapter assembly, at least one shield member, a cover ring and an insulator member. The shield assembly is designed so that the consumables can be replaced in one step and allows the chamber to continue with its maintenance cycle.

6797131, Sep 28, 2004

Nov 12, 2002

10/293641

Alan Barry Liu - Mountain View CA
James Tsung - San Jose CA

Applied Materials, Inc. - Santa Clara CA

C23C 1434

20419238, 20429811, 20429841, 427446

A method and apparatus for forming a coating on a sputter chamber workpiece. The apparatus generally includes a sputter chamber having at least one workpiece. The at least one workpiece generally includes one or more trenches formed therein, the trenches being configured to define an arc spray coating region. The method generally includes forming one or more trenches in the workpiece, the trenches defining a coating region and applying a metal coating to the coating region by arc spraying.

D505668, May 31, 2005

Mar 26, 2004

29/202165

Alan Liu - Brisbane CA, US

1403

D14194, D14188

D505669, May 31, 2005

Mar 26, 2004

29/202186

Alan Liu - Brisbane CA, US

1403

D14194, D14188

7097744, Aug 29, 2006

Jun 12, 2003

10/460865

Alan Barry Liu - Mountain View CA, US
Marc O. Schweitzer - San Jose CA, US
James Stephen Van Gogh - Sunnyvale CA, US
Michael Rosenstein - Sunnyvale CA, US
Jennifer L. Watia - Mountain View CA, US
Xinyu Zhang - Fremont CA, US
Yoichiro Tanaka - San Jose CA, US
John C. Forster - San Francisco CA, US
Anthony Chen - Los Altos Hills CA, US

Applied Materials, Inc. - Santa Clara CA

C23C 14/35

20419212, 20429811

In one embodiment, a target alignment surface disposed on a target support mechanically engages a darkspace shield alignment surface disposed on a darkspace shield as the target is lodged into a chamber body. The respective alignment surfaces are shaped and positioned so that the darkspace shield is physically moved to a desired aligned position as the alignment surfaces engage each other. In this manner a darkspace shield may be directly aligned to a target within a semiconductor fabrication chamber to provide a suitable darkspace gap between the target and the darkspace shield.

7561015, Jul 14, 2009

Dec 2, 2003

10/727132

Anthony Vesci - San Jose CA, US
Alan B. Liu - Mountain View CA, US
Donny Young - San Francisco CA, US
Joe F. Sommers - San Jose CA, US
Kevin Hughes - San Jose CA, US

Applied Materials, Inc. - Santa Clara CA

H01F 7/02

335302, 335285, 335294, 335303, 206818, 223109 A, 224183, 264611, 31015628

A magnet encapsulated within a canister formed from two cans into a laminated structure particularly useful in plasma processing reactors. Each can includes an end wall and a cylindrical sidewall. One can additionally includes an annular lip that slidably fits outside the sidewall of the other can with a small gap therebetween. The magnet is inserted into the two cans together with a flowable and curable adhesive such as epoxy. The cans are slid together and compressed to cause the adhesive to flow between the magnet and the two cans and between the lip of one can and the sidewall of the other. The adhesive is cured to bond the magnet to the cans and to bond the cans together and to also hermetically seal the structure. The cans may be deep drawn from non-magnetic stainless steel with wall thicknesses of less than 0. 064 mm.

20030116432, Jun 26, 2003

Dec 26, 2001

10/036320

Marc Schweitzer - San Jose CA, US
Dinesh Saigal - San Jose CA, US
Alan Liu - Mountain View CA, US

APPLIED MATERIALS, INC.

C23C014/34

204/298110, 204/298070, 204/298190, 204/298200, 204/298230, 204/298290

Embodiments of the invention provide a processing apparatus having a lower reactor portion, an adjustable reactor wall portion attached to an upper portion of the lower reactor portion, the adjustable reactor wall portion being configured for selective linear expansion and contraction, and a source assembly positioned above the adjustable reactor wall portion. The cooperative operation of the source, adjustable wall, and the lower reactor creates a processing apparatus wherein the throw distance may be varied without disassembly of the reactor.