Inventors:
Darrell E. Newell - DeKalb IL
Alan P. Genis - Sycamore IL
Gregg Westberg - DeKalb IL
Susan M. Nemes - DeKalb IL
Assignee:
Northern Illinois University - DeKalb IL
International Classification:
G01N 2700
H03B 532
Abstract:
A system is described which comprises many quartz resonators, all formed on the same quartz substrate. The method of fabrication ensures that all the resonators are mechanically and electrically isolated from each other. The oscillation frequencies of the resonators may be individually adjusted to different desired values during fabrication. Since the deviation from the optimum angle of cut is the same for all the resonators because they are all on the same substrate, all the resonators have the same temperature coefficient (change of frequency per degree change in temperature). Mounting the electronic circuitry on the quartz substrate simplifies the interconnections between the resonators and the circuitry, and reduces the size of the resulting device.