Inventors:
Hamid Balamane - Palo Alto CA, US
Christian Rene Bonhote - San Jose CA, US
Yimin Hsu - Sunnyvale CA, US
Aaron Neuhaus - San Jose CA, US
Aron Pentek - San Jose CA, US
Yi Zheng - San Ramon CA, US
Assignee:
Hitachi Global Storage Technologies Netherlands B.V. - Amsterdam
International Classification:
G11B 5/127
H04R 31/00
US Classification:
2960316, 2960307, 2960313, 2960314, 2960315, 2960318, 216 65, 360121, 360122, 360317, 427127, 427128, 451 5, 451 41
Abstract:
A method for manufacturing a magnetic write head for perpendicular magnetic recording having a write pole with a very narrow track width and well controlled critical dimensions. The write pole is formed by depositing an electrically conductive seed layer over a substrate, and then depositing a photo resist layer over the seed layer. The photo resist layer is photolithographically exposed and developed to form an opening or trench in the photoreist layer, the opening defining the pattern of the write pole. A magnetic material is then plated into the opening in the photoresist layer. The photo resist layer can then be removed by a chemical lift off, and portions of the seed layer that are not covered by the write pole can be removed by ion milling.
