Inventors:
Philip A. Stupar - Oxnard CA, US
Jeffrey F. DeNatale - Thousand Oaks CA, US
Jun J. Yao - San Diego CA, US
Sangtae Park - Sugar Land TX, US
Assignee:
Teledyne Licensing, LLC - Thousand Oaks CA
International Classification:
H05K 3/10
US Classification:
29846, 29825, 29830, 361277, 361278, 361280, 361281, 438689, 438694, 438697, 216 11, 216 33, 216 36, 216 80
Abstract:
A process for fabricating a MEMS device comprises the steps of depositing and patterning on one side of a wafer a layer of material having a preselected electrical resistivity; bonding a substrate to the one side of the wafer using an adhesive bonding agent, the substrate overlying the patterned layer of material; selectively removing portions of the wafer from the side opposite the one side to define stationary and movable MEMS elements; and selectively removing the adhesive bonding agent to release the movable MEMS element, at least a portion of the layer of material being disposed so as to be attached to the movable MEMS element.